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Journal Articles

Depth profile analysis of multi-layer laminated thin film interface by spatiotemporal angle-resolved APXPS method

Toyoda, Satoshi*; Yoshimura, Masashi*; Sumida, Hirosuke*; Mineoi, Susumu*; Machida, Masatake*; Yoshigoe, Akitaka; Yoshikawa, Akira*; Suzuki, Satoru*; Yokoyama, Kazushi*

Hoshako, 35(3), p.200 - 206, 2022/05

The present status of spatiotemporal depth profiling analysis of the multilayer stacked film interface based on Ambient Pressure X-ray Photoelectron Spectroscopy (APXPS) is presented. To begin with, depth profiles of the multilayer stacked film interfaces have been achieved by time-division Near Ambient Pressure Hard X-ray Angle-Resolved PhotoEmission Spectroscopy data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division angle resolved AP-XPS data including spatial resolution, which enables us to realize spatiotemporal depth profiles of the interfaces under reaction conditions such as oxidation and reduction. In addition, it is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling is effective to perform dynamic measurement of depth profiles with high precision.

Journal Articles

Development of measurement and analysis techniques in X-ray photoelectron spectroscopy; From NAP-HARPES to 4D-XPS

Toyoda, Satoshi*; Yamamoto, Tomoki*; Yoshimura, Masashi*; Sumida, Hirosuke*; Mineoi, Susumu*; Machida, Masatake*; Yoshigoe, Akitaka; Suzuki, Satoru*; Yokoyama, Kazushi*; Ohashi, Yuji*; et al.

Vacuum and Surface Science, 64(2), p.86 - 91, 2021/02

https://doi.org/10.1380/vss.64.86

We have developed measurement and analysis techniques in X-ray photoelectron spectroscopy. To begin with, time-division depth profiles of gate stacked film interfaces have been achieved by NAP-HARPES (Near Ambient Pressure Hard X-ray Angle-Resolved Photo Emission Spectroscopy) data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division ARPES data, which enables us to realize 4D-XPS analysis. It is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling in NAP-HARPES data is effective to perform dynamic measurement of depth profiles with high precision.

Journal Articles

Non-destructive depth analysis of the surface oxide layer on Mg $_{2}$ Si with XPS and XAS

Esaka, Fumitaka; Nojima, Takehiro; Udono, Haruhiko*; Magara, Masaaki; Yamamoto, Hiroyuki

Surface and Interface Analysis, 48(7), p.432 - 435, 2016/07

https://doi.org/10.1002/sia.5939

Times Cited Count：16 Percentile：39.42(Chemistry, Physical)

XPS is widely used for non-destructive chemical state analysis of solid materials. In this method, depth profiling can be carried out by a combination with ion beam sputtering. However, the sputtering often causes segregation and preferential sputtering of atoms and gives inaccurate information. The use of energy-tunable X-rays from synchrotron radiation (SR) enables us to perform non-destructive depth profiling in XPS. Here, the analytical depth can be changed by changing excitation X-ray energy. In the present study, we examined methods to perform depth profiling with XPS by changing excitation energy and XAS by changing electron energy for detection. These methods were then applied to the analysis of native surface oxide layers on Mg $_{2}$ Si crystals. In this XAS analysis, the peak at 1843.4 eV becomes dominant when the electron energy for detection increases, which implies that Si-O or Si-O-Mg structure is formed as the surface oxide layer on the Mg $_{2}$ Si.

Journal Articles

Study of oxide film with the hard X-ray photoelectron spectroscopy

Kobata, Masaaki; Kobayashi, Keisuke*

Journal of the Vacuum Society of Japan, 58(2), p.43 - 49, 2015/02

https://doi.org/10.3131/jvsj2.58.43

We report the applications of a hard X-ray photoelectron spectroscopy to the characterization of SiO $_{2}$ /Si(001)systems. Large escape depth of high-energy photoelectron enables us to probe buried layers and their interfaces in multilayer structures. Estimation of SiO $_{2}$ overlayer thicknesses up to 25 nm by angle resolved XPS was possible in SiO $_{2}$ /Si(001) samples. Determination of the thickness profile of a wedged shape SiO $_{2}$ buried layer was successfully done in Ir (8 nm)/HfO $_{2}$ (2.2 nm)/thickness graded-SiO $_{2}$ (0-10 nm) / Si (100). The Si 1s core level showed a SiO $_{2}$ thickness dependent shift, which was ascribed to fixed charge at the SiO $_{2}$ -Si interface. Energy distribution of interface states at ultrathin thermal oxide/Si(100) interfaces were determined by Si 1 core level shift by applying gate bias in metal-oxide-semiconductor (MOS) structure with 5 nm Au gate electrodes.

Journal Articles

Fabrication of -FeSi $_{2}$ thin films on Si(III) surface by solid phase epitaxy (SPE) analyzed by means of synchrotron radiation XPS (SR-XPS)

Saito, Takeru; Yamamoto, Hiroyuki; Asaoka, Hidehito; Haraguchi, Masaharu*; Imamura, Motoyasu*; Matsubayashi, Nobuyuki*; Tanaka, Tomoaki*; Shimada, Hiromichi*; Hojo, Kiichi

Analytical Sciences (CD-ROM), 17(Suppl.), p.1073 - 1076, 2002/03

no abstracts in English

Journal Articles

Formation process of -FeSi $_{2}$ on Si(111) substrate studied by means of SR-XPS

Saito, Takeru; Yamamoto, Hiroyuki; Haraguchi, Masaharu*; Imamura, Motoyasu*; Matsubayashi, Nobuyuki*; Tanaka, Tomoaki*; Shimada, Hiromichi*; Hojo, Kiichi

Photon Factory Activity Report 2001, (19), P. 205, 2001/00

http://pfwww.kek.jp/acr2001pdf/PartB/PF01UR205.pdf

no abstracts in English

JAEA Reports

Measurement of tritium activity in the aluminum pipe of JRR-2 heavy water primary cooling system using imaging plate

Motoishi, Shoji; Kobayashi, Katsutoshi; Saeki, Hideya*

JAERI-Tech 2000-070, 34 Pages, 2000/12

JAERI-Tech-2000-070.pdf:5.19MB

no abstracts in English

Journal Articles

Non-destructive depth profile analysis by high-energy synchrotron-radiation XPS

Yamamoto, Hiroyuki; Baba, Yuji

Journal of the Korean Vacuum Society, 9(S2), p.84 - 88, 2000/11

no abstracts in English

JAEA Reports

Observation of melt surface depressions during electron beam evaporation

Oba, Hironori; Shibata, Takemasa

JAERI-Research 2000-032, 17 Pages, 2000/08

JAERI-Research-2000-032.pdf:2.65MB

no abstracts in English

Journal Articles

Non-destructive depth profile analysis of SiO $_{2}$ /Si layer by high-energy XPS

Yamamoto, Hiroyuki; Baba, Yuji

Journal of Surface Analysis, 7(1), p.122 - 127, 2000/03

no abstracts in English

JAEA Reports

Corrosion of iron buried in clay

Sumiyama, Morio*

JNC TJ8400 2000-009, 138 Pages, 2000/02

JNC-TJ8400-2000-009.pdf:3.0MB

To evaluate corrosion behavior of carbon steel, a candidate materials of overpack, buried in soil for a long time, the water pipes buried in freshwater clay for a long time we digged out and the soil environment and the corrosion weight loss of pipes have been researched. From the results, a corrosion model (an empirical equation), an oxygen reduction reaction rate-determing step type, of carbon steel buried in soil was introduced. The corrosion data of under ground pipe collected by the Japan Community Gas Associations was used to increase reliability of the corrosion model equation. These data are one of researches of corrosion behavior of carbon steel buried in soil for a long time studied by at home and abroad. 38 samples buried freshwater clay were selected in 171 samples. With estimating the corrosion velocities and the soil environment factors of the above data, the maximum depth of pit corrosion was calculated by the statistical method of the extreme values using the area of overpack as the recurrent time. The correlation between the soil environment factors and the corrosion weight loss was obtained by the correlation analysis. The corrosion model of the maximum depth of pit corrosion at 0.99 of cumulative probability was compared between the under ground pipe data and the above data. On the reference data and the above data, the corrosion model equation; H = aY $^{n}$ was compared with the maximum depth of pit corrosion at 0.99 cumulative probability. The data of water pipes and community gas pipes at 0.99 cumulative probability showed the reasonable values when these data were compared with the reference data. So that the model was proved as a good corrosion model m the neutral low dissolved oxygen environment.

JAEA Reports

Data collection by literature survey on rock physical properties in Japan (II)

Sato, Toshinori; Taniguchi, Wataru; Fujita, Tomoo; Hasegawa, Hiroshi

JNC TN7400 99-011, 36 Pages, 1999/12

JNC-TN7400-99-011.pdf:1.55MB

In order to understand the general thermal and mechanical properties of rock masses and initial stress of rock at depth, data were compiled from the published literature in Japan and collected from investigations carried out at Kamaishi mine and Tono mine. Statistical examinations derived the ranges, means and medians of the mechanical properties for the different rock types. It was confirmed that the correlations between the mechanical properties were in agreement with correlations determined previously in other similar surveys. The unconfined compressive strength of Neogene sedimentary rocks showed a tendency to increase with increasing depth ( 500 m). An examination of the measured initial stress data collected through literature surveys showed that the vertical stress can be approximated by the extent of gravitational loading at a particular point. There is an approximately linear relationship between the average stress in a horizontal plane and the depth. The lateral pressure coefficient tends to have a high value and large range at shallow depths, but tends towards 1 with increasing depth.